Silicon Molecular Beam Epitaxy

 ( Book Product ) 

This subject is divided into two volumes

• Silicon Molecular Beam Epitaxy available on July 01 2018 from VitalSource for itemprop="offers" target="_external" title="" itemscope itemtype="http://schema.org/Offer">50.0
  
• ISBN bar code 9781351093521 ξ1 registered July 01 2018
  
• Product category is Book

• Sku # 9781351093521R90
  

Volume I is on homoepitaxy with the necessary systems, techniques, and models for growth and dopant incorporation. Three chapters on homoepitaxy are followed by two chapters describing the different ways in which MBE may be applied to create insulator/Si stackings which may be used for three-dimensional circuits. The two remaining chapters in Volume I are devoted to device applications. The first three chapters of Volume II treat all aspects of heteroepitaxy with the exception of the epitaxial insulator/Si structures already treated in volume I.

^ Silicon Molecular Beam Epitaxy VitalSource. ISBN 9781351093521 (revised Jul 2018)