References
^ (2015). Silicon Processing For The Vlsi Era, Vol. 1: Process Technology ISBN 9780961672164 (revised Sep 2015)^ Stanley Wolf, Richard N TauberSilicon Processing for the VLSI Era : Process Technology Vol. 1 by Stanley Wolf and Richard N. Tauber (2000, Hardcover) ISBN 9780961672164 (revised Mar 2015)^ (2015). Silicon Processing for the VLSI Era: Volume 1 - Process Technology BiggerBooks. ISBN 9780961672164 (revised Oct 2023)
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