Handbook Of Silicon Based Mems Materials And Technologies

 ( Book Product ) 

• Handbook of Silicon Based MEMS Materials and Technologies available on November 05 2023 from BiggerBooks for 277.09
  
• Handbook Of Silicon Based Mems Materials And Technologies available on July 17 2022 from Indigo for 362.5
  
• Handbook of Silicon Based MEMS Materials and Technologies available on May 20 2016 from ECampus for 268.13
  
• Handbook Of Silicon Based Mems Materials And Technologies available on May 11 2016 from VitalSource for itemprop="offers" target="_external" title="" itemscope itemtype="http://schema.org/Offer">275.0
  
• ISBN bar code 9780815515944 ξ1 registered November 05 2023
  
• ISBN bar code 9780815515944 ξ2 registered July 17 2022
  
• ISBN bar code 9780815515944 ξ3 registered July 21 2013
  
• ISBN bar code 9780815515944 ξ4 registered May 11 2016
  
• Product category is Handbook of Silicon Based MEMS Materials and Technologies, 9780815515944, Book, Textbook Book

• Sku # 9780815515944N
  
• Sku # 978081551594
  
• Sku # 9780815515944
  

Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R mechanical, electrostatic, optical, etc , manufacturing, processing, measuring incl. focused beam techniques , and multiscale modeling methods of MEMS structures

^ Lindroos, Veikko; Tilli, Markku; Lehto, Ari; Motooka, Teruaki (2014). Handbook of Silicon Based MEMS Materials and Technologies, Elsevier Science Ltd. BiggerBooks. ISBN 9780815515944 (revised Nov 2023)
^ Handbook Of Silicon Based Mems Materials And Technologies Indigo. ISBN 9780815515944 (revised Jul 2022)
^ (2013). Handbook of Silicon Based MEMS Materials and Technologies ECampus. ISBN 9780815515944 (revised May 2016)
^ Handbook Of Silicon Based Mems Materials And Technologies VitalSource. ISBN 9780815515944 (revised May 2016)