A multigate device, multi-gate MOSFET or multi-gate field-effect transistor ( MuGFET) refers to a metal–oxide–semiconductor field-effect transistor (MOSFET) that has more than one gate on a single transistor. The multiple gates may be controlled by a single gate electrode, wherein the multiple gate surfaces act electrically as a single gate, or by independent gate electrodes. A multigate device employing independent gate electrodes is sometimes called a multiple-independent-gate field-effect transistor ( MIGFET). The most widely used multi-gate devices are the FinFET (fin field-effect transistor) and the GAAFET (gate-all-around field-effect transistor), which are non-planar transistors, or 3D transistors.
Multi-gate are one of the several strategies being developed by MOSFET semiconductor manufacturers to create ever-smaller microprocessors and memory cells, colloquially referred to as extending Moore's law (in its narrow, specific version concerning density scaling, exclusive of its careless historical conflation with Dennard scaling).Risch, L. "Pushing CMOS Beyond the Roadmap", Proceedings of ESSCIRC, 2005, p. 63. Development efforts into multigate transistors have been reported by the Electrotechnical Laboratory, Toshiba, Grenoble INP, Hitachi, IBM, TSMC, UC Berkeley, Infineon Technologies, Intel, AMD, Samsung Electronics, KAIST, Freescale Semiconductor, and others, and the ITRS predicted correctly that such devices will be the cornerstone of Nanoelectronics. Table39b The primary roadblock to widespread implementation is manufacturability, as both planar and non-planar designs present significant challenges, especially with respect to photolithography and patterning. Other complementary strategies for device scaling include channel strain engineering, silicon-on-insulator-based technologies, and high-κ/metal gate materials.
Dual-gate MOSFETs are commonly used in very high frequency (VHF) mixers and in sensitive VHF front-end amplifiers. They are available from manufacturers such as Motorola, NXP Semiconductors, and Hitachi.
[https://ieeexplore.ieee.org/document/4357895/;jsessionid=1C0AD4BA1F0781C1E1278A968B459B5A?arnumber=4357895]FlexFET was developed and is manufactured by American Semiconductor, Inc.
The first FinFET transistor type was called a depleted lean-channel transistor or "DELTA" transistor, which was first fabricated by Hitachi's Digh Hisamoto, Toru Kaga, Yoshifumi Kawamoto and Eiji Takeda in 1989. In the late 1990s, Digh Hisamoto began collaborating with an international team of researchers on further developing DELTA technology, including TSMC's Chenming Hu and a UC Berkeley research team including Tsu-Jae King Liu, Jeffrey Bokor, Xuejue Huang, Leland Chang, Nick Lindert, S. Ahmed, Cyrus Tabery, Yang-Kyu Choi, Pushkar Ranade, Sriram Balasubramanian, A. Agarwal and M. Ameen. In 1998, the team developed the first N-channel FinFETs and successfully fabricated devices down to a 17nm process. The following year, they developed the first P-channel FinFETs. They coined the term "FinFET" (fin field-effect transistor) in a December 2000 paper.
In current usage the term FinFET has a less precise definition. Among microprocessor manufacturers, AMD, IBM, and Freescale describe their double-gate development efforts as FinFET development, whereas Intel avoids using the term when describing their closely related tri-gate architecture. In the technical literature, FinFET is used somewhat generically to describe any fin-based, multigate transistor architecture regardless of number of gates. It is common for a single FinFET transistor to contain several fins, arranged side by side and all covered by the same gate, that act electrically as one, to increase drive strength and performance. The gate may also cover the entirety of the fin(s).
A 25 nm transistor operating on just 0.7 volt was demonstrated in December 2002 by TSMC (Taiwan Semiconductor Manufacturing Company). The "Omega FinFET" design is named after the similarity between the Greek letter omega (Ω) and the shape in which the gate wraps around the source/drain structure. It has a gate delay of just 0.39 picosecond (ps) for the N-type transistor and 0.88 ps for the P-type.
In 2004, Samsung Electronics demonstrated a "Bulk FinFET" design, which made it possible to mass-produce FinFET devices. They demonstrated dynamic random-access memory (DRAM) manufactured with a 90nm Bulk FinFET process. In 2006, a team of Korean researchers from the KAIST (KAIST) and the National Nano Fab Center developed a 3 nm transistor, the world's smallest nanoelectronic device, based on FinFET technology. In 2011, Rice University researchers Masoud Rostami and Kartik Mohanram demonstrated that FINFETs can have two electrically independent gates, which gives circuit designers more flexibility to design with efficient, low-power gates.
In 2012, Intel started using FinFETs for its future commercial devices. Leaks suggest that Intel's FinFET has an unusual shape of a triangle rather than rectangle, and it is speculated that this might be either because a triangle has a higher structural strength and can be more reliably manufactured or because a triangular prism has a higher area-to-volume ratio than a rectangular prism, thus increasing switching performance.
In September 2012, GlobalFoundries announced plans to offer a 14-nanometer process technology featuring FinFET three-dimensional transistors in 2014. The next month, the rival company TSMC announced start early or "risk" production of 16 nm FinFETs in November 2013.
In March 2014, TSMC announced that it is nearing implementation of several 16 nm FinFETs die-on wafers manufacturing Photolitography:
AMD released GPUs using their Polaris chip architecture and made on 14 nm FinFET in June 2016. The company has tried to produce a design to provide a "generational jump in power efficiency" while also offering stable frame rates for graphics, gaming, virtual reality, and multimedia applications.
In March 2017, Samsung and eSilicon announced the Tape-out for production of a 14 nm FinFET ASIC in a 2.5D package.
Intel announced this technology in September 2002. High Performance Non-Planar Tri-gate Transistor Architecture; Dr. Gerald Marcyk. Intel, 2002 Intel announced "triple-gate transistors" which maximize "transistor switching performance and decreases power-wasting leakage". A year later, in September 2003, AMD announced that it was working on similar technology at the International Conference on Solid State Devices and Materials.[4] No further announcements of this technology were made until Intel's announcement in May 2011, although it was stated at IDF 2011, that they demonstrated a working SRAM chip based on this technology at IDF 2009.
On April 23, 2012, Intel released a new line of CPUs, termed Ivy Bridge, which feature tri-gate transistors. Intel has been working on its tri-gate architecture since 2002, but it took until 2011 to work out mass-production issues. The new style of transistor was described on May 4, 2011, in San Francisco. It was announced that Intel's factories were expected to make upgrades over 2011 and 2012 to be able to manufacture the Ivy Bridge CPUs. It was announced that the new transistors would also be used in Intel's Atom chips for low-powered devices.
Tri-gate fabrication was used by Intel for the non-planar transistor architecture used in Ivy Bridge, Haswell and Skylake processors. These transistors employ a single gate stacked on top of two vertical gates (a single gate wrapped over three sides of the channel), allowing essentially three times the surface area for to travel. Intel reports that their tri-gate transistors reduce leakage and consume far less Electric power than previous transistors. This allows up to 37% higher speed or a power consumption at under 50% of the previous type of transistors used by Intel. Intel to Present on 22-nm Tri-gate Technology at VLSI Symposium (ElectroIQ 2012)
Intel explains: "The additional control enables as much transistor current flowing as possible when the transistor is in the 'on' state (for performance), and as close to zero as possible when it is in the 'off' state (to minimize power), and enables the transistor to switch very quickly between the two states (again, for performance)." Intel has stated that all products after Sandy Bridge will be based upon this design.
The term tri-gate is sometimes used generically to denote any multigate FET with three effective gates or channels.
GAAFET, also known as a surrounding-gate transistor (SGT), is similar in concept to a FinFET except that the gate material surrounds the channel region on all sides. Depending on design, gate-all-around FETs can have two or four effective gates. Gate-all-around FETs have been successfully characterized both theoretically and experimentally. They have also been successfully etched onto of InGaAs, which have a higher electron mobility than silicon.
A gate-all-around (GAA) MOSFET was first demonstrated in 1988, by a Toshiba research team including Fujio Masuoka, Hiroshi Takato, and Kazumasa Sunouchi, who demonstrated a vertical nanowire GAAFET which they called a "surrounding gate transistor" (SGT). Masuoka, best known as the inventor of flash memory, later left Toshiba and founded Unisantis Electronics in 2004 to research surrounding-gate technology along with Tohoku University. In 2006, a team of Korean researchers from the KAIST (KAIST) and the National Nano Fab Center developed a 3 nm transistor, the world's smallest nanoelectronic device, based on gate-all-around (GAA) FinFET technology. GAAFET transistors may make use of high-k/metal gate materials. GAAFETs with up to 7 have been demonstrated which allow for improved performance and/or reduced device footprint. The widths of the nanosheets in GAAFETs is controllable which more easily allows for the adjustment of device characteristics.
As of 2020, Samsung and Intel have announced plans to mass produce GAAFET transistors (specifically MBCFET transistors) while TSMC has announced that they will continue to use FinFETs in their 3 nm node, despite TSMC developing GAAFET transistors.
In a multigate device, the channel is surrounded by several gates on multiple surfaces. Thus it provides better electrical control over the channel, allowing more effective suppression of "off-state" leakage current. Multiple gates also allow enhanced current in the "on" state, also known as drive current. Multigate transistors also provide a better analog performance due to a higher intrinsic gain and lower channel length modulation.
All of the important multi-gate (MG) transistor behavior is captured by this model. Volume inversion is included in the solution of Poisson's equation, hence the subsequent I–V formulation automatically captures the volume-inversion effect. Analysis of electrostatic potential in the body of MG MOSFETs provided a model equation for short-channel effects (SCE). The extra electrostatic control from the end gates (top/bottom gates) (triple or quadruple-gate) is also captured in the short-channel model.
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