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Modeling and Characterization of Sacrificial Polysilicon Etching Using Vapor-Phase Xenon Difluoride
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ISBN 9780780382657
REGISTERED: 05/03/20
UPDATED: 10/25/20

Modeling and Characterization of Sacrificial Polysilicon Etching Using Vapor-Phase Xenon Difluoride


Specifications
  • ISBN bar code 9780780382657 ξ1 registered April 25 2012
  • ISBN bar code 9780780382657 ξ2 registered April 25 2012
  • Product category is Book


References
    ^ Modeling and Characterization of Sacrificial Polysilicon Etching Using Vapor-Phase Xenon Difluoride, IEEE. (revised Apr 2012)
    ^ Modeling and Characterization of Sacrificial Polysilicon Etching Using Vapor-Phase Xenon Difluoride, IEEE. (revised Apr 2012)

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